کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10156004 | 1666369 | 2019 | 35 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Influence of deposition condition on electrical properties of a-IGZO films deposited by plasma-enhanced reactive sputtering
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
فلزات و آلیاژها
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The effects of sputtered atom flux on the electrical properties of a-IGZO films before and after thermal annealing were examined by varying the fluxes of sputtered atoms at the substrate holder. The electrical proprieties of IGZO TFTs fabricated from a-IGZO films were found to vary widely depending on the sputtered atom flux. Specifically, the electrical properties of a-IGZO films after thermal annealing improved considerably with increasing sputtered atom flux, such that a field effect mobility as high as 23.6 cm2Vâ1sâ1 was achieved following annealing. These results suggest that the electrical characteristics of IGZO TFTs after annealing are affected by the film structure, including the density and quality of the as-deposited a-IGZO films.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Alloys and Compounds - Volume 772, 25 January 2019, Pages 642-649
Journal: Journal of Alloys and Compounds - Volume 772, 25 January 2019, Pages 642-649
نویسندگان
Kosuke Takenaka, Masashi Endo, Giichiro Uchida, Akinori Ebe, Yuichi Setsuhara,