Fabrication of microlens array on 6H-SiC mold by an integrated microcutting-etching process

A microcutting-etching method involving the combination of single-point diamond cutting with inductively coupled plasma (ICP) etching is proposed to fabricate microlens arrays on 6H-SiC, as shown in Fig. 1. The techniques to control the accuracy of the microlens array on 6H-SiC are managed by studying the cutting process, selectivity ratio and etching condition. A ring-shaped microlens array on 6H-SiC mold with excellent accuracy and consistency is generated via this method, as shown in Fig. 2.148