Detection of interstitial oxygen contents in Czochralski grown silicon crystals using internal calibration in laser-induced breakdown spectroscopy (LIBS)

Detection of interstitial oxygen contents in Czochralski grown silicon crystals using internal calibration in laser-induced breakdown spectroscopy (LIBS)

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Talanta - Volume 193, 1 February 2019, Pages 192-198

Seyyed Ali Davari, Patrick A. Taylor, Robert W. Standley, Dibyendu Mukherjee,