Studies on the surface morphology and hydrophobic property of NiTi thin films under in situ and post annealing various temperatures

• Studied difference between post and in situ annealing on roughness of NiTi film.
• Hydrophobic property of sputtered NiTi thin films was discussed.

Surface morphology and hydrophobic property of NiTi thin films are investigated under various in situ and post annealing temperatures. The XRD and AFM results reveal that in situ annealed NiTi thin films crystallize at lower temperature and have larger surface roughness than post annealed samples. Heating during sputtering provides energy for atoms to move to position of equilibrium, thus more regular crystal structure is observed in in situ annealed NiTi thin films. Another reason for the smoother surface observed in post annealed thin films is that large amount of Ni4Ti3 precipitation in hinders the formation of B19′ phase. The contact angle becomes larger with the increase of surface roughness and the maximum contact angle of 123.5° is achieved in 600 °C in situ annealed thin film with 41.7 nm surface roughness.