Micro-bending testing of electrodeposited gold for applications as movable components in MEMS devices

Micro-bending testing of electrodeposited gold for applications as movable components in MEMS devices

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 180, 5 August 2017, Pages 15-19

Keisuke Asano, Hao-Chun Tang, Chun-Yi Chen, Takashi Nagoshi, Tso-Fu Mark Chang, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,