کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
4970899 1450307 2017 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Surface enhanced thermo lithography
ترجمه فارسی عنوان
سطح لیتوگرافی ترمو را افزایش داد
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر سخت افزارها و معماری
چکیده انگلیسی


- We used electroless deposition to fabricate clusters of silver nanoparticles.
- These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments.
- When those EM field are absorbed by metal NPs generate severe temperature increases.
- Here, we realized a thermo-lithography of a polymer assisted by bi-dimensional photonics structures.
- We used a Raman set-up to transfer geometrical patterns into a layer of thermo sensitive polymer.

We used electroless deposition to fabricate clusters of silver nanoparticles (NPs) on a silicon substrate. These clusters are plasmonics devices that induce giant electromagnetic (EM) field increments. When those EM field are absorbed by the metal NPs clusters generate, in turn, severe temperature increases. Here, we used the laser radiation of a conventional Raman set-up to transfer geometrical patterns from a template of metal NPs clusters into a layer of thermo sensitive Polyphthalaldehyde (PPA) polymer. Temperature profile on the devices depends on specific arrangements of silver nanoparticles. In plane temperature variations may be controlled with (i) high nano-meter spatial precision and (ii) single Kelvin temperature resolution on varying the shape, size and spacing of metal nanostructures. This scheme can be used to generate strongly localized heat amplifications for applications in nanotechnology, surface enhanced thermo-lithography (SETL), biology and medicine (for space resolved cell ablation and treatment), nano-chemistry.

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ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volume 174, 25 April 2017, Pages 52-58
نویسندگان
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