کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
4970925 | 1450305 | 2017 | 4 صفحه PDF | دانلود رایگان |
- Fe- or Fe oxide-embedded freestanding anodic alumina membrane.
- Very high-aspect-ratio nanoholes were filled by using atmospheric CVD.
- Developed for continuous nanocarbon growth.
The present paper investigates the development of a novel process for fabricating catalyst membranes for a carbon transmittance method (CTM). The CTM is a continuous growth method for carbon nanotubes (CNTs) in which one chamber containing carbon source gas and another chamber filled with an inert gas for CNT growth are separated by a catalyst-embedded membrane. In the present study, the membranes were fabricated by filling the nanopores of a self-supporting anodic alumina membrane (AAM) with chemical-vapor-deposited Fe using Fe(CO)5 as a precursor. Nanocarbon (NC) was grown by a (non-CTM) catalytic chemical vapor deposition (CCVD) method, which is a standard technique for CNT growth, at 700 °C using C2H2 as a carbon source. The embedded Fe was oxidized during the temperature ramp prior to C2H2 addition, whereas the oxidized Fe functioned as a catalyst for NC growth. When the pores of the AAM were filled with Fe oxide, the fill Fe oxide functioned as a good catalyst.
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Journal: Microelectronic Engineering - Volume 176, 25 May 2017, Pages 58-61