کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5008027 1461837 2017 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Compensation of nonlinear hardening effect in a nanoelectromechanical torsional resonator
ترجمه فارسی عنوان
جبران خسارت غیرخطی در یک رزوناتور تسریع نانو الکترومکانیکی
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
چکیده انگلیسی


- Nonlinearities of nano-torsional resonator has been experimentally studied.
- An analytical model based on perturbation method is proposed.
- Critical amplitudes expressions for both nonlinearities types are provided.
- An evidence of nonlinear hardening compensation is shown.

A mechanical resonator based on torsional resonance has been fabricated in our facilities to sense infrared radiation. Actuation and detection are both electrostatic. Reaching phonon noise is highly desirable in order to get low noise uncooled infrared detectors. Therefore a high dynamic range has to be reached to increase as much as possible the overall signal to noise ratio and minimize the contribution of amplitudes noises (thermomechanical or electrical) to frequency noise. The dimensions of resonator body are similar to most clamped-clamped NEMS and our devices are thus also greatly affected by nonlinearities. We present here a nonlinear model for mechanical behavior around fundamental mode resonance taking account of both mechanical and electrostatic nonlinearities. The model correctly reproduces the nonlinear behavior observed for different resonator designs. We experimentally observe on some devices a compensation of hardening effects, allowing a linear operation of torsion angle up to 13°. The model provided in this work allows an engineering strategy in order to design high linear dynamic range for fundamental torsional mode.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 263, 15 August 2017, Pages 326-331
نویسندگان
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