Design and fabrication of suspended Si3N4 nanobeam cavities

• Design of photonic band gap nanobeam cavities
• Theoretical study on photonic crystal nanobeams (PhCNB) in air-bridge silicon nitride structures
• Electron beam lithography
• Fabrication of silicon nitride nanobeams

We report on the design, theoretical simulations and fabrication details of photonic crystal nanobeams (PhCNB) in air-bridge silicon nitride structures. The PhC nanobeams consist of a one-dimensional photonic crystal lattice of circular air holes. The design of structures that show band gaps for the waveguide modes will allow the creation of suspended photonic nanobeam cavities in a second step. The silicon nitride layer is deposited on top of a thermally oxidized silicon wafer with LPCVD followed by e-beam lithography and proper wet etching to release the suspended structures.

Figure optionsDownload as PowerPoint slide