کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
5467264 1518614 2017 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A new ion-beam laboratory for materials research at the Slovak University of Technology
ترجمه فارسی عنوان
آزمایشگاه جدید یون پرتو برای تحقیقات مواد در دانشگاه صنعتی اسلواکی
کلمات کلیدی
ایمپلنت یون شتاب دهنده تجزیه و تحلیل پرتو یون، پرتو یون
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
چکیده انگلیسی
An ion beam laboratory (IBL) for materials research has been commissioned recently at the Slovak University of Technology within the University Science Park CAMBO located in Trnava. The facility will support research in the field of materials science, physical engineering and nanotechnology. Ion-beam materials modification (IBMM) as well as ion-beam analysis (IBA) are covered and deliverable ion energies are in the range from tens of keV up to tens of MeV. Two systems have been put into operation. First, a high current version of the HVEE 6 MV Tandetron electrostatic tandem accelerator with duoplasmatron and cesium sputtering ion sources, equipped with two end-stations: a high-energy ion implantation and IBA end-station which includes RBS, PIXE and ERDA analytical systems. Second, a 500 kV implanter equipped with a Bernas type ion source and two experimental wafer processing end-stations. The facility itself, operational experience and first IBMM and IBA experiments are presented together with near-future plans and ongoing development of the IBL.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 409, 15 October 2017, Pages 264-267
نویسندگان
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