Preparation and thermoelectric characteristics of ITO/Pt thin film thermocouples on Ni-based superalloy substrate

Thin film thermocouples could provide precise temperature measurement of the hot components of gas turbine engines with fast response in harsh environments. ITO thin films were prepared by radio frequency magnetron sputtering in pure argon atmosphere and annealed in air at 1000 °C. The variation of the microstructure and electrical properties of indium tin oxide thin films with annealing was disclosed. ITO/Pt thin film thermocouple was fabricated on Ni-based superalloy substrate by sputtering with stencil mask. And the thermoelectric performance and stability of the thin film thermocouples were characterized with temperature up to 1100 °C.