Design and test of HTS magnet for circular planar magnetron cathode

The HTS magnet with half-closure iron yoke is investigated for circular planar magnetron cathode application. The design optimization of the magnet is performed with two optimization objectives: the maximum value of the horizontal component of magnetic field (Br) on the target surface Br1max, and the maximum value of Br where the magnetic field is parallel to the target surface Br2max. Aimed at the magnetron cathode with 3 inch target, the HTS coils are fabricated with YBCO tapes, and the iron yoke is fabricated with 1J22 alloy. The critical current and magnetic field of HTS magnet are simulated and tested at 77 K, the results show that the critical current of HTS magnet is about 50 A, and the designed HTS circular magnetron could generate the magnetic field higher than 0.13 T on the target surface, which could meet the requirement of high-field magnetron sputtering.