Enhancement in structure stability of gold micro-cantilever by constrained fixed-end in MEMS devices

Enhancement in structure stability of gold micro-cantilever by constrained fixed-end in MEMS devices

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Microelectronic Engineering - Volumes 187–188, 5 February 2018, Pages 105-109

Minami Teranishi, Chun-Yi Chen, Tso-Fu Mark Chang, Toshifumi Konishi, Daisuke Yamane, Katsuyuki Machida, Kazuya Masu, Masato Sone,