کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
803879 1467846 2015 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
FEM analysis of the vibrational motion of oblique piezoelectric microcantilever in the vicinity of a sample surface in liquid
موضوعات مرتبط
مهندسی و علوم پایه سایر رشته های مهندسی مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
FEM analysis of the vibrational motion of oblique piezoelectric microcantilever in the vicinity of a sample surface in liquid
چکیده انگلیسی

This article examines an oblique Microcantilever (MC) with an extended piezoelectric layer in liquid. The study of hydrodynamic force in MC which has been floated in viscous fluid is considered as paramount importance. To model the Vibrational motion, the Hamilton's principle has been used. For this purpose, the Vibrational motion equation has been modeled by considering the continuous beam based on the Euler–Bernoulli beam theory in liquid. Furthermore, using the Galerkin method and the Newmark algorithm, the differential equations of the MC has been solved. In this modeling, the inter-atomic forces between the MC tip and the sample surface have been considered in addition to the hydrodynamic and squeeze forces. The simulation results illustrate a reduction in the sensitivity of the vibrational motion under the effect of the squeeze force during the angularization of the MC. Moreover, the results illustrate that by reducing the MC distance from the sample surface, the Vibration amplitude decreases due to the increase in the fluid squeeze force. At the end, it has been shown that the time delay in sample surface topography in liquid substantially decreases in comparison with the air.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Precision Engineering - Volume 42, October 2015, Pages 208–217
نویسندگان
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