Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10133578 | Sensors and Actuators A: Physical | 2018 | 7 Pages |
Abstract
This study aims to report the design of high-performance piezoelectric MEMS energy harvesters using a full batch MEMS-fabrication process with a Si proof mass and multilayered Pb(Zr,Ti)O3 (PZT) thin films without bonding of a proof mass and/or bulk piezoelectric ceramics. These devices contain sputtered multilayered PZT thin films with internal metal electrodes as a thick energy-conversion layer. The thickening of the piezoelectric layer by multilayer sputter deposition technique enabled the batch fabrication of high-performance piezoelectric MEMS harvesters. These fabricated device with the footprint of 10âÃâ10 mm2 was found to provide a high output power of 53.7 μW per gravitational acceleration. These results are expected to be useful for the future development of alternatives to batteries for autonomous sensor systems.
Related Topics
Physical Sciences and Engineering
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Authors
Kensuke Kanda, Shota Hirai, Takayuki Fujita, Kazusuke Maenaka,