Article ID Journal Published Year Pages File Type
10134210 Optik - International Journal for Light and Electron Optics 2018 17 Pages PDF
Abstract
Palladium oxide (PdO) thin films were deposited by RF reactive magnetron sputtering onto glass substrates. The argon and oxygen partial pressures were (9.43 × 10−3 Torr) and (1.87 × 10−2 Torr) at room temperature respectively. The thicknesses of the deposited films were in the range of about (50-150 nm). Necessary thickness, structural, electrical and sensing properties of PdO films were methodically examined. X-ray diffraction method has shown a polycrystalline structure with a preferred reflection peak at (220) plane. The scanning electron microscope analysis has revealed a growth of nanoparticles in all prepared films. Electrical properties have shown strong dependence on thickness variation. Gas sensitivity of nitrogen dioxide and hydrogen gases were about (91%) and (90%) respectively. It was observed that gas sensitivity of PdO thin films increases as the film thickness increases.
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Physical Sciences and Engineering Engineering Engineering (General)
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