Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10146757 | Journal of Materials Processing Technology | 2019 | 5 Pages |
Abstract
Frequency selective surfaces (FSSs) with periodic smart structures have widespread applications in many areas, especially in electromagnetic wave filters. In this paper, a rapid and high-performance processing technology for large-area FSSs was presented. This novel technology combined laser direct writing lithography (LDWL) with wet chemical etching (WCE) (i.e., LDWLâ+âWCE). Basing on experiments and in the condition of optimal parameters (i.e., 40âmW laser power, 1000âmm/s scan speed, single scan, 20âμm hatch space, pattern-profile scan path, and ferric chloride aqueous solution as etchant) of LDWLâ+âWCE, a large-area (200âÃâ200âmm2) aperture type FSS with 625 square-loop units was fabricated within 8âmin on a FR-4 copper-clad plate (with 12âμm-thickness copper layer). When the same FSS was prepared by commonly-used laser direct ablation (LDA) technology with itself optimal processing parameters, it needed about 62âmin (nearly 8 times as much time as the former). Scanning electron microscopy (SEM) and surface probe profilometry analyses showed that the edges of the square-loop patterns fabricated by LDWLâ+âWCE were steeper and smoother, and the FR-4 substrate had no damage. In an anechoic chamber, the electromagnetic wave filtering performances of the as-prepared FSSs were tested, and the results indicated that the FSS fabricated by LDWLâ+âWCE had a bandpass response at 7.08âGHz with a transmittance of 97.75%. Its frequency response curve was in better agreement with the simulation result. The technology of LDWLâ+âWCE also has the potential to rapidly fabricate large-area and/or non-planar FSSs with high performance.
Related Topics
Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
Jun Ai, Huiqing Xiang, Qifeng Du, Dongchu Chen, Jianguo Liu, Xiaoyan Zeng,