Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10226519 | Precision Engineering | 2018 | 7 Pages |
Abstract
A microcutting-etching method involving the combination of single-point diamond cutting with inductively coupled plasma (ICP) etching is proposed to fabricate microlens arrays on 6H-SiC, as shown in Fig. 1. The techniques to control the accuracy of the microlens array on 6H-SiC are managed by studying the cutting process, selectivity ratio and etching condition. A ring-shaped microlens array on 6H-SiC mold with excellent accuracy and consistency is generated via this method, as shown in Fig. 2.148
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Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
Tianfeng Zhou, Ruzhen Xu, Benshuai Ruan, Zhiqiang Liang, Xibin Wang,