Article ID Journal Published Year Pages File Type
10268575 Electrochimica Acta 2011 6 Pages PDF
Abstract
► We study the effect of FIB patterning on pore evolution during anodization. ► FIB patterned concaves with 1.5 nm depth can effectively guide nanopore growth. ► The edge effect of FIB guided patterns causes nanopores to bend. ► Anodization window is enlarged to 50-80 V for 150 nm interpore distance hexagonal arrays.
Related Topics
Physical Sciences and Engineering Chemical Engineering Chemical Engineering (General)
Authors
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