Article ID Journal Published Year Pages File Type
10407045 Materials Science in Semiconductor Processing 2013 4 Pages PDF
Abstract
Based on a potential application for the Si/SiC heterojunction to realize light control of SiC devices, structures and electrical properties of boron-doped silicon layer deposited on the n-type 6H-SiC substrate by hot-wall chemical vapor deposition were investigated in this paper.X-ray diffraction analysis and scanning electronic microscopy were used to characterize the crystal structure and morphology of the deposited silicon layer. Results of I-V and C-V measurements indicated that the heterojunction was abrupt manifesting obvious p-n junction properties. During the I-V measurement, the Si/SiC heterojunction developed a remarkable photovoltaic effect under illumination condition.
Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
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