Improving the resolution of a solid immersion lens optical system using a multiphase Fresnel zone plate

We propose a method to improve the resolution of near-field optical system with a solid immersion lens by using a multiphase level Fresnel zone plate. The analyses are based on scalar angular spectrum theory. The results show that the multiphase Fresnel zone plate can not only decrease the spot size but also decrease the sidelobe intensity and enhance greatly the diffractive efficiency compared with annular amplitude filter or binary 2-, 3-, 4-zone phase filter.