Arrayed waveguide grating multiplexer with high thermal stability on silicon

In this paper, certain important parameters are optimized for a polymer/Si arrayed waveguide grating (AWG) multiplexer by using grating theory. A 32-channel multiplexer is designed and fabricated using newly synthesized fluorinated poly (ether ether ketone) with a high thermal stability. The measured wavelength channel spacing is 0.796 nm, and center wavelength and 3-dB bandwidth are 1548 nm and 0.3 nm, respectively.