| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10408549 | Optics and Lasers in Engineering | 2012 | 5 Pages |
Abstract
⺠A white light interferometer system using a single-chip colour CCD for 3-D surface profiling on micro-samples is demonstrated. ⺠The proposed method makes the data acquisition and phase evaluation procedures as simple as in case of single wavelength method. ⺠The use of colour CCD camera in white light interferometry makes the measurement faster, simple. ⺠And cost effective, which is very much useful for industrial applications.
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Authors
U. Paul Kumar, Wang Haifeng, N. Krishna Mohan, M.P. Kothiyal,