| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10408550 | Optics and Lasers in Engineering | 2012 | 8 Pages |
Abstract
⺠Customization of Ti:S laser allows high speed WSI scans of over 100 nm. ⺠Automatic exposure compensation for variation of laser power with wavelength. ⺠Nonlinear tuning curve due to laser mode hops corrected through resampling algorithms. ⺠Depth resolution improved>100x, approaching theoretical limit for scans up to 37 nm.
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Physical Sciences and Engineering
Engineering
Electrical and Electronic Engineering
Authors
A. Davila, J.M. Huntley, C. Pallikarakis, P.D. Ruiz, J.M. Coupland,