Article ID Journal Published Year Pages File Type
10408563 Optics and Lasers in Engineering 2011 7 Pages PDF
Abstract
► One to two ratio rotating polarizer analyzer ellipsometer is constructed. ► Mathematical analysis is shown in detail. ► Optical properties of c-Si, Au, and ZnSe were obtained experimentally. ► Two ellipsometry standards were investigated.
Related Topics
Physical Sciences and Engineering Engineering Electrical and Electronic Engineering
Authors
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