Silicon microphone with wide frequency range and high linearity

This paper reports a silicon microphone with a wide frequency range and high linearity and its novel fabrication process. The transducer has a monolithic structure and is simply fabricated from a bonded silicon wafer. A frequency range from 30 Hz to 20 kHz, which covers the audio frequency, and a total harmonic distortion less than 0.3% at a sound pressure level of 20 Pa (120 dBSPL) are obtained. The measured sensitivity of the transducer is −52 dBV/Pa (1 kHz), which is in good agreement with the calculated value.