| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10409398 | Sensors and Actuators A: Physical | 2006 | 8 Pages |
Abstract
In this paper, a micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. The cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8Â mm and a height of 2.2Â mm, was developed as stator transducer for traveling wave type ultrasonic motor. The transducer was made of lead zirconate titanate (PZT) bulk ceramics, and formed by micro machining, Ni plating and laser beam cutting process. Using this stator transducer, we have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0Â mm and a height of 5.9Â mm. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
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Authors
Takefumi Kanda, Akira Makino, Tomohisa Ono, Koichi Suzumori, Takeshi Morita, Minoru Kuribayashi Kurosawa,