| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10409399 | Sensors and Actuators A: Physical | 2006 | 8 Pages |
Abstract
This paper describes a miniature optical displacement sensor with millimetric range and nanometric resolution. This kind of sensor should be integrated in a mesomachine able to make accurate micro/nano-manipulation tasks on wide strokes. This sensor consists of a triangular grating and two fiber optic probes. We introduce the sensor principle and the modeling. The grating is obtained by diamond turning on aluminum alloy. The agreement between simulation and experimental results is very good and the mini-sensor is able to measure a displacement with a 14.9Â nm resolution over a 11.8Â mm range.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Christine Prelle, Frédéric Lamarque, Philippe Revel,