| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10409401 | Sensors and Actuators A: Physical | 2006 | 8 Pages |
Abstract
In this paper we present a novel MEMS force sensor that exploits the post-buckling phenomenon of slender silicon columns. The design philosophy and fabrication process is discussed and analytical expressions for the force-displacement characteristics are developed. The sensor can be used to perform quantitative and qualitative measurements in-situ in SEM, TEM or STM, where the small chamber size makes it challenging to integrate conventional force-displacement sensors. Potential applications for the sensor are characterization of carbon nanotube-polymer interfaces, nanoscale thin film testing and mechanical testing of single biological cells.
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Authors
B.A. Samuel, A.V. Desai, M.A. Haque,