Linearization of the scanning field for 2D torsional micromirror by RBF neural network

We report a radial basis function (RBF) neural network (NN) method to linearize the scanning field of a 2D torsional micromirror, which is distorted by the intrinsic nonlinearity of the electrostatic torques. The 2D micromirror system is modelled and the parameters are identified. The feasibility of the method is shown. The system model is coded in the analog hardware description language (AHDL) for system level simulation in Saber^{TM}. The experiment is implemented in National Instrument's LabVIEW^{TM} with a real-time embedded controller and a data acquisition card. The NN algorithm is coded in C language as a Dynamic Link Library (DLL) to make it easily integrated into both Saber™ and LabVIEW™. The experimental results agree well with the simulation ones. The distortion rates are improved from 28% in simulation and 23% in experiment to a negligible level respectively.