| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10409612 | Sensors and Actuators A: Physical | 2005 | 8 Pages |
Abstract
A MEMS varactor using torsional beams for actuation is proposed. Analytical expression for electrostatic torque developed is derived. The structure is compared with existing structures for dynamic range and actuation voltage. It is demonstrated that the proposed varactor outperforms the other structures in terms of wide dynamic range and lower actuation voltage, coupled with ease of fabrication. A methodology to choose the dimensions of varactor beams and plates has been outlined.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
C. Venkatesh, Shashidhar Pati, Navakanta Bhat, Rudra Pratap,