| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10409665 | Sensors and Actuators A: Physical | 2005 | 6 Pages |
Abstract
Based on the results of the measurements, it is proven that the pump principle can be transferred to micro-systems. It is shown that a differential pressure between the fore vacuum side and the high vacuum side is achieved due to the pumping effect of the supersonic jet.
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
M. Doms, J. Mueller,