Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10409676 | Sensors and Actuators A: Physical | 2005 | 8 Pages |
Abstract
High-density micromirror arrays (1296 mirrors) have been fabricated with a process that combines the benefits of both bulk and surface micromachining. Arrays fabricated with this technique are characterized by optically flat mirrors characterized by radius of curvature (ROC) â¼1 m, spring constant uniformity (â¼6%) across the array, and yields greater than 90%. Each array element consists of a mirror-in-gimbal structure that allows the mirror to rotate about two orthogonal axes when voltage is applied to electrodes beneath the mirror. A dry release process combined with through wafer etching and spin-cast polyimide is introduced as a simple, effective alternative to critical point drying for releasing the structures. Tilt angle measurements for these devices show stable angular range of ±5° (mechanical) at 160-170 V.
Keywords
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Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
T.D. Kudrle, C.C. Wang, M.G. Bancu, J.C. Hsiao, A. Pareek, M. Waelti, G.A. Kirkos, T. Shone, C.D. Fung, C.H. Mastrangelo,