Tunable passband T-filter with electrostatically-driven polysilicon micromechanical resonators

A 2.4 MHz tunable bandpass T-filter built from three micromechanical silicon-micromachined electrostatically-driven resonators is demonstrated for the first time. Non-linear properties of electrostatical transducers are used to obtain a voltage-control of the transmission zero and pole distribution; a novel charge biasing technique is employed for electrostatical transducer biasing. Transmission zero frequency tuning is demonstrated.