Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10409716 | Sensors and Actuators A: Physical | 2005 | 8 Pages |
Abstract
In this work, we studied the effect of crystallographic orientation on fracture toughness and fracture paths of single crystal silicon film by a uniaxial tensile test. A focused ion beam (FIB) process was used to introduce a notch in the middle of silicon (1 1 0) and (0 0 1) film specimens that have different tensile orientations. The fracture toughness value varied from 1 to 2 MPa m1/2, depending on the tensile orientation. The scanning electron microscope (SEM) observations suggested that the inclination angle of the low index planes, {1 1 1} and {1 1 0}, relative to the specimen surface affects the fracture path significantly. The {1 1 1} and {1 1 0} planes were the preferred cleavage planes.
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Authors
Xueping Li, Takashi Kasai, Shigeki Nakao, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato, Hiroshi Tanaka,