Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10409807 | Optics & Laser Technology | 2005 | 5 Pages |
Abstract
A valid method for measuring the large-aperture convex surface by using a curved diffractive optical element (DOE) and a Zygo interferometer is demonstrated experimentally. In this method, the direct use of source and high-resolution CCD camera of Zygo interferometer represents a major advance in the areas of adjustment. The DOE, fabricated by combining laser direct writing and lithography, results in higher accuracy, efficiency and lower cost for testing aspheric compared with other types of DOE employed. We have fabricated one optical test system and measured a 110-mm-diameter convex surface of errors 44.3Â nm rms and 311Â nm P-V.
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Authors
Hua Liu, Zhenwu Lu, Fengyou Li,