Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10409899 | Sensors and Actuators A: Physical | 2005 | 12 Pages |
Abstract
The high step in refractive index from the silicon core to gas allows very small bending radii so that a sufficiently long waveguide can be realised on a small chip area (about 1Â m on 1Â cm2) by arranging it as a spiral or meander in the wafer plane.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Electrochemistry
Authors
Ralf Siebert, Jörg Müller,