Development nano-Moiré method with high-resolution microscopy at FML

Some novel nano-Moiré methods have been developed at failure mechanics lab in the Tsinghua University, recently. This paper offers an introduction of these new methods, which can be realized under the atomic force microscope, scanning tunneling microscope, as well as the transmission electron microscope. These nano-Moiré methods are able to offer quantitative analysis to nano-deformation of object. The measurement principles and experimental techniques of these methods are described in detail. A new digital nano-Moiré technique is proposed. Some typical applications to these methods are discussed. The successful experimental results demonstrate the feasibility of these methods and also verify that the methods can offer a high sensitivity for displacement measurement with nano-meter spatial resolution.