Coupled-field analysis of piezoelectric beam actuator using FEM

This paper aims to present an efficient method to simulate and analyze the structural and electrical chrematistics of piezoelectric beam actuators at the same time. A silicon-based clamp-free beam mounted with a PZT layer on both sides is used for analysis. The couple-field analysis is important for MEMS and the use of FEM to achieve the accurate results and time saving is the trend at this moment. In this study, the harmonic response, resonant frequency of the piezoelectric plate, and the equivalent piezoelectric circuit of the piezoelectric transducer are investigated in this study. The simulated results are compared to the experimental and theoretic values as well.