Article ID Journal Published Year Pages File Type
10418751 Journal of Materials Processing Technology 2013 9 Pages PDF
Abstract
► The surface of EDM'd single-crystal silicon has been studied. ► Nano-scale pores and crystals of tool material are observed for the first time. ► A twinned-crystalline structure is formed in the recast layer. ► The structure is formed by epitaxial growth during resolidification.
Keywords
Related Topics
Physical Sciences and Engineering Engineering Industrial and Manufacturing Engineering
Preview
TEM study on the electrical discharge machined surface of single-crystal silicon
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