Investigation on the traceability of three dimensional scanning electron microscope measurements based on the stereo-pair technique

Results from magnification calibration and tilt angle measurement were used for calculating the theoretical uncertainty on the vertical elevation. Experimental deviations measured on gauge-block steps showed slightly bigger values than those calculated from the theoretical model. Lateral measurement on the reconstructed three-dimensional topography of the type C roughness standards showed good agreement with the nominal profile wavelength values.