Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10420312 | Precision Engineering | 2014 | 8 Pages |
Abstract
- We have developed a system for the measurement of error motions of microspindles.
- We demonstrated the usefulness of the system by using it for actual measurements.
- The major error factors of the measurements were analyzed.
- A form error of the rod lens significantly affected the measurement accuracy.
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
Hiroshi Murakami, Akio Katsuki, Takao Sajima,