Article ID Journal Published Year Pages File Type
10420312 Precision Engineering 2014 8 Pages PDF
Abstract

- We have developed a system for the measurement of error motions of microspindles.
- We demonstrated the usefulness of the system by using it for actual measurements.
- The major error factors of the measurements were analyzed.
- A form error of the rod lens significantly affected the measurement accuracy.
Related Topics
Physical Sciences and Engineering Engineering Industrial and Manufacturing Engineering
Authors
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