Article ID Journal Published Year Pages File Type
10420576 Precision Engineering 2013 10 Pages PDF
Abstract
► Develop a compact 6-DOF controlled maglev lens driving actuator. ► Real-time relative displacement control between laser beam and nozzle. ► Real-time focal point adjustment of laser beam. ► Sufficient positioning accuracy under extreme working acceleration.
Related Topics
Physical Sciences and Engineering Engineering Industrial and Manufacturing Engineering
Authors
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