Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10420576 | Precision Engineering | 2013 | 10 Pages |
Abstract
⺠Develop a compact 6-DOF controlled maglev lens driving actuator. ⺠Real-time relative displacement control between laser beam and nozzle. ⺠Real-time focal point adjustment of laser beam. ⺠Sufficient positioning accuracy under extreme working acceleration.
Keywords
Related Topics
Physical Sciences and Engineering
Engineering
Industrial and Manufacturing Engineering
Authors
Dongjue He, Tadahiko Shinshi, Takahiro Nakai,