| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10420578 | Precision Engineering | 2013 | 11 Pages |
Abstract
⺠The dynamic equations of an electrostatic actuator under three situations are deduced. ⺠Effects of van der Waals force or Casimir force on the natural frequencies are investigated. ⺠Effects of van der Waals force or Casimir force on vibrating modes are studied. ⺠When the molecular forces are considered, the natural frequency drops. ⺠Molecular forces have obvious effects on the modes under certain condition.
Related Topics
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Authors
Lizhong Xu, Dan Zhao,