Article ID Journal Published Year Pages File Type
10420585 Precision Engineering 2013 11 Pages PDF
Abstract
► Two deformable mirrors for EUV lithography are modeled, realized and validated. ► Seven and 19 thermo-mechanical actuators are used for axial deformation. ► Mirror deflections of 0.68 nm per degree Celsius are realized and no hysteresis is observed.
Keywords
Related Topics
Physical Sciences and Engineering Engineering Industrial and Manufacturing Engineering
Preview
Deformable mirrors with thermo-mechanical actuators for extreme ultraviolet lithography: Design, realization and validation
Authors
, , ,