| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 10420588 | Precision Engineering | 2013 | 9 Pages |
Abstract
⺠Design of the first low stiffness 6 DoF compliant precision stage. ⺠Combination of 3 statically balanced units for out-of-the horizontal-plane motions. ⺠A statically balanced unit consists of a negative and a positive stiffness unit. ⺠Combination of 3 flexible rods for the in-the-horizontal-plane motions. ⺠A prototype showed high potential, with a smallest residual stiffness of 0.4 N/mm.
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Engineering
Industrial and Manufacturing Engineering
Authors
A.G. Dunning, N. Tolou, J.L. Herder,