Structural, morphological, optical, and electrical properties of In2O3 nanostructured thin films

Indium oxide (In2O3) nanostructured thin films are prepared by ultrasonic spray technique on glass substrates at 350 °C. Solution flow rate influence on the structural, morphological, optical and electrical properties of these samples is then studied. A number of techniques, as well as X-ray diffraction (XRD), SEM, and UV-vis are used to characterize the physical properties of these films. X-ray diffraction analysis indicates the spherical indium oxide nanoparticles (20 nm to 67 nm) were in single-crystalline phase with body-centered cubic structure, and the preferred growth orientation change with the change of Solution Spray Rate. The films exhibit high optical transparency >80% in the visible region. The higher value of the optical band gap was 3.93 eV due to the quantum confinement effect. The film grown at 55 ml/h showed low resistivity (8.5 10−3 Ω cm).