Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10429256 | Biosensors and Bioelectronics | 2012 | 9 Pages |
Abstract
⺠Acoustic wave MEMS biosensors are simple and portable in compared to fluorescent microscopy and SPR. ⺠FBARs, SAW and Love-wave biosensors are highly sensitive in both dry and liquid environments. ⺠Shear mode FBARs can maintain high Q during the operation in liquid making best suited as biosensors. ⺠Each FBAR in a biosensor array can be functionalized separately to detect different analytes. ⺠Simple fabrication methods can be used to integrate Si FBAR biosensor with readout circuitry.
Keywords
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Ioana Voiculescu, Anis Nurashikin Nordin,