Article ID Journal Published Year Pages File Type
10546444 Journal of the American Society for Mass Spectrometry 2008 7 Pages PDF
Abstract
Decomposition mechanism of distibines was illustrated under near-CVD conditions. Intramolecular disproportionation reaction forms a deposition intermediate (stibinidine) that allows a clean and low-temperature path to form the Sb deposit.
Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
Authors
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