Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
10559042 | Spectrochimica Acta Part B: Atomic Spectroscopy | 2005 | 6 Pages |
Abstract
The layer thickness determined by both methods agreed within their combined uncertainties. In view of the limits of X-ray reflectometry for very thin layers, laterally inhomogeneous samples, and multi-elemental layer compositions, reference-free X-ray fluorescence analysis offers the potential for the thickness determination of such samples.
Related Topics
Physical Sciences and Engineering
Chemistry
Analytical Chemistry
Authors
Michael Kolbe, Burkhard Beckhoff, Michael Krumrey, Gerhard Ulm,