Article ID Journal Published Year Pages File Type
10559042 Spectrochimica Acta Part B: Atomic Spectroscopy 2005 6 Pages PDF
Abstract
The layer thickness determined by both methods agreed within their combined uncertainties. In view of the limits of X-ray reflectometry for very thin layers, laterally inhomogeneous samples, and multi-elemental layer compositions, reference-free X-ray fluorescence analysis offers the potential for the thickness determination of such samples.
Related Topics
Physical Sciences and Engineering Chemistry Analytical Chemistry
Authors
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